Silicon photonics is coming of age; however, it is still lacking a monolithic platform for optical sources and nonlinear functionalities prompting heterogeneous integration of different materials tailored to different applications. Here we demonstrate tellurium oxide as a complementary metal oxide semiconductor silicon photonics platform for nonlinear functionalities, which is already becoming an established platform for sources and amplifiers. We show broadband supercontinuum generation covering the entire telecom window and show for the first time to our knowledge third-harmonic generation in its integrated embodiment. Together with the now-available lasers and amplifiers on integrated TeO2 this work paves the way for a monolithic TeO2-based nonlinear silicon photonics platform.

We report the fabrication and characterization of silicon carbide microdisks on top of silicon pillars suited for applications from near- to mid-infrared. We probe 10 μm diameter disks with different under-etching depths, from 4 μm down to 1.4 μm, fabricated by isotropic plasma etching and extract quality factors up to 8400 at telecom wavelength. Our geometry is suited to present high Q single-mode operation. We experimentally demonstrate high-order whispering-gallery mode suppression while preserving the fundamental gallery mode and investigate some requirements for nonlinear optics applications on this platform, specifically in terms of quality factor and dispersion for Kerr frequency comb generation.